Full Field Optical Metrology and Applications

Full Field Optical Metrology and ApplicationsThis book explores specific optical techniques and methods in Full Field based metrology. The text covers surface metrology and is useful for scientists and engineers. It explores other characteristics related to the surface, such as strain, stress, vibration, contouring, and its x, y, and z displacements. Also, the book presents modern methods for phase retrieval, and optical coherence tomography (OCT).

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